JPH01148766U - - Google Patents
Info
- Publication number
- JPH01148766U JPH01148766U JP4633188U JP4633188U JPH01148766U JP H01148766 U JPH01148766 U JP H01148766U JP 4633188 U JP4633188 U JP 4633188U JP 4633188 U JP4633188 U JP 4633188U JP H01148766 U JPH01148766 U JP H01148766U
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- liquid tank
- barrier
- molecules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 238000000638 solvent extraction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633188U JPH01148766U (en]) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4633188U JPH01148766U (en]) | 1988-04-06 | 1988-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148766U true JPH01148766U (en]) | 1989-10-16 |
Family
ID=31272602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4633188U Pending JPH01148766U (en]) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148766U (en]) |
-
1988
- 1988-04-06 JP JP4633188U patent/JPH01148766U/ja active Pending
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